From: Michael Huth (enigma_at_mail.lipsia.de)
Date: 2008-05-16 02:29:51
Hello,
you know I don't write often here, but this might be of interest.
I got a defect VIC2 R3 from Stephan Lesch today to map the IC.
At first I thought this can be quite complicated and may require to put
it into the ESEM (Environmental Scanning Electron Microscope),
but after a brief check in an optical microscope the ICs structure was
good visible. With a good adjustment of the image plane there are
also the layers distinguishable. At least upto the third I guess. This
was done at about 5000x.
The mapping images were taken at 1000x. The width of a 'conduction line'
is about 6 micrometer.
I took an image every 0.5 mm whereas each image shows a wier area so
there is an overlap to put the images together.
To give you a brief idea how this looks I uploaded two images at:
http://mail.lipsia.de/~enigma/vic2/10_5.png
http://mail.lipsia.de/~enigma/vic2/10_6.png
10_6 is in the grid to the top of 10_5.
So someone can read these images?
Ciao...
...Micha
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